Ion beams with energies from a few kilo electron-volts (keV) to Mega electron-volts (MeV) have been used for materials analysis, modifications, and synthesis in a wide range of fields involving semiconductors, metallurgy, photovoltaics, and biomaterials. Recent advances in the manufacturing process and ion optics theory have led to the development of scanning probes with a high spatial resolution (micro-few hundred nano-meter) mainly using H+ or He+ ions. These focused ion beams allow the quantitative elemental analysis of a wide range of elements with unprecedented detection sensitivity in a short time, especially for physiologically important metals (ppm level). In addition to new ways to utilize these probes as analytical tools, the ion beams are used to modify the composition and structures from the surface to deep buried layers. In this presentation, we will be illustrating examples of quantitative multi-dimensional elemental analysis in many systems as well as examples of the modifications of materials at nanometers scale.
Dr. Bibhudutta, Rout is currently a tenured Associate Professor of Physics at the University of North Texas. He has more than 27 years of experience in research involving ion beams. His research interest involves materials microanalysis and modification using ion beams. He is involved in the development of many new-generation ion microprobes using ion accelerators. He has published more than 100 peer-review publications, supervised 7 Ph.D. Students thesis and chaired international conferences and topical sessions.